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PRESSURE REGULATOR FOR SEMICOUNDUCTOR GASES
(I)For Ultra High Purity Gases
Super-TORR sr.This is the trade name for the pressure regulators for the ultra high purity gases developed to cope with the MEGA BITS technology.
The regulators were developed by using technology of the TORR series regulators that had enormous references in the semiconductor process gas line. This series is highly regarded since its starting marking for these ten and a few years.
The manufacturer establish the lineup of high level products to cope with the market demands that becomes higher and higher adding the Super-TORRII series that is small and light model,and the Super-TORRIII series that has a variety of specifications for each use.
---------- Features of the Super-TORR ----------
--The regulator are assembled in the clean rooms of 0.1£gm class except for polishing level X on the Super-TORRIII.
--Utilizing welding and metallic seals of the regulators minimize leakage to outside.
--Compound electrolytic polishing(*1)o gas contacting metal surface of the regulators and reduction of the regulators' interal volumes realize degassing and particle decreasing.
--To improve safety (*2) and lifetime for corrosive gases the Super-TORR uses anti-corrosion alloys. The Super-TORRII series has two models, 1800 serises and E1800 series. The former is for highly corrosive gases high anti-corrosion alloy Hastelloy on its gas contacting surfaces, and the latter uses Hastelloy on its important parts.
--The Super-TORRIII series has the SH series as standard that use Hastelloy on its important parts to use of corrosive gases.
--The Super-TORRIII series has the A10 series for the negative pressure gases and low vapor pressure gases. Its diaphragm and regulator valve are directly connected.
--The Super-TORR can use optimum resins for each requirement.
--The Super-TORR has the built-in filter to prevent from obstacles' flowing-in to the regulator and it reduces remarkably internal valve leakage except for the Super-TORR H50WV series and the Super-TORR 150 series.
--Thr Super-TORR receives one hundred percent inspection of helium leakage testing and particle testing, although the particle testing one the Super-TORRIII serises is optional.
--The Super-TORR has good flow capacity performance with even its small sized body.
--The manufacturer can deliver the regulators of high pressure gas certification.
(*1)The Super-TORR has 3 types of polishing specifications depending on customers' requirements including no polishing.
(*2)The lifetime of the regulator varies substantially depending on the customers' using conditions. The regulator using Hastelloy has,in general,lower failure rate than that using stainless steel. The former has less leakage to outside due to corrosion at the parts of thin wall thickness on the pressure gauge or diaphragm.
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---------- SERIES AND APPLICATION ----------
1.For Piping
(1)S-TORRIII 30Sr.
*For non-corrosive semiconductor gases.(SHsr. For corrosive gases)
*Standard type.
*Norminal flow : 90NL/min(nor) at P1=1.5MPa and P2=0.6MPa
*Consult the Hsin Teng Trading Co.,Ltd when using at 200cc/min or less.
(2)S-TORRIII 50sr.
*For non-corrosive semiconductor gases.(SHsr. For corrosive gases.)
*For medium flow rate.
*Norminal flow : 400NL/min(nor) at P1=1.5MPa and P2=0.6MPa
(3)S-TORR 150sr.
*For non-corrosive semiconductor gases.
*For high flow rate.
*Norminal flow : 1,200NL/min(nor) at P1=1.5MPa and P2=0.6MPa
2.For Corrosive Gases
(1)S-TORRII 1800sr.
*For highly corrosive gases.
*Using high anti-corrosive alloy Hastelloy on all the surfaces contacting gas.
*Example of norminal flow : HCL 35NL/min,CL2 10NL/min.
(2)S-TORRII E1800sr.
*For corrosive gases.
*Using high anti-corrosive alloy Hastelloy on all the surfaces contacting gas expect for the body and joints.
*For uses not requiring the Super-TORRII 1800sr.
*Example of norminal flow : HCL 35NL/min , CL2 10NL/min.
*Consult the Hsin Teng Trading Co.,Ltd that Super-TORRII E1800sr. can not full fill the flow rate requirement.
3.For High Inlet Pressure Gases.
(1)S-TORRII 1300sr.
*For non-corrosive semiconductor gases in cylinders.(1800sr. for corrosive gases)
*Standard model.
*Norminal flow : 80NL/min(nor) at P1=10MPa and P2=1MPa
*Consult Hsin Teng Trading Co.,Ltd when using at 200cc/min or less.
(2)S-TOORII 2300sr.
*For non-corrosive semoconductor gases in cylinders.
*For not only compressed gases but also for liquefied gases.
*For medium flow rate.
*Norminal flow : 400NL/min(nor) at P1=10MPa and P2=1MPa.
4.Special Purpose Regulator
(1)S-TORR H50WVsr.
*For non-corrosive semiconductor gases.
*For high pressure use with pressure and gas tightness testing.
*Norminal flow : 20NL/min(nor) at P1=10MPa and P2=3MPa.
(2)S-TORRIII A10sr.
*For non-corrosive semiconductor gases.(SHsr. For corrosive gases)
*For use requiring negative pressure control.
*For pressure control on low vapor pressure gases.
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LINE FILTER
---------- FEATURES ----------
--HIGH PRECISION:This product is made of stainless steel 316L for TLF series, and 316 for SHF series as its material. The low pressure line filter TLF series uses a Teflon membrane for a filter element to remove efficiently smaller particles than those specified in the specifications thanks to uniform mesh size on the element.
--GAS TIGHTNESS:All the joints are welded and the manufacturer guarantees1.3 ¡Ñ10-10Pa.m3/sec or less of leakage to outside.
--INTERNAL SURFACE POLISHING:The low pressure line filter TLF series can supply highly clean gases because its internal surface is polishing finished as standard.
--SMALL SIZE AND LIGHT WEIGHT:The line filter is small and light,thus it saves spaces for piping.
---------- APPLICATION ----------
This filter is appropriate for gas lines requiring high purity keeping such as gases for semiconductor ,and analysis,etc. |
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