半導體氣體用調整器
(I)超高純度氣體用調整器
--- SUPER-TORR之特點 ----
--0.1μm 等級10之無塵室內組裝.(但S-TORRIII磨光等級X者除外)
--連接部位採用熔接(本體/接管).金屬氣封,降低外部洩漏.
--根據接觸氣體金屬部位之複合電解磨光處理(*1)及縮小容積至脫泡,塵粒減少.
--S-TORRII系列用於強腐蝕性氣體,備有採用接觸金屬部位使用高耐防蝕性合金赫史特合金之1800系列及重要部位使用赫史特合金之E1800系列調整器.強化並提昇腐蝕性氣體可使用期間及安全性.(*2)
--S-TORRIII系列為能處理腐蝕性氣體,重要部位採用赫史特合金之[SH系列]調整器為標準品.
--用於負壓控制,低蒸氣壓氣體,S-TORR系列備有[膜片/閥座連接型]之A10系列調整器.
--備有針對各種氣體最適宜之樹脂,可充分滿足各項要求.
--內藏防範由上流側混入液物之過濾器, 大幅降低內部洩漏.(但S-TORR H50WV系列/S-TORR 150系列除外)
--全數實施氦氣洩漏測試,塵粒測試.(但S-TORRIII之塵粒測試為選購品)
--小型但展現高性能流量.
--高壓氣體認證品可製作.
(*1)S-TORRIII系列含無磨光,計有3種磨光規格為準.
(*2)關於強腐蝕性氣體,腐蝕性氣體,依據客戶使用方式,可供使用期限差異頗大,一般SUS與赫史特合金相較,後者使用故障率較小.另外,因壓力計,膜片等壁厚較薄部分腐蝕外漏發生較少.
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------ 系列名稱與用途 -------
1.For Piping
(1)S-TORRIII 30Sr.
*For non-corrosive semiconductor gases.(SHsr. For corrosive gases)
*Standard type.
*Norminal flow : 90NL/min(nor) at P1=1.5MPa and P2=0.6MPa
*Consult the Hsin Teng Trading Co.,Ltd when using at 200cc/min or less.
(2)S-TORRIII 50sr.
*For non-corrosive semiconductor gases.(SHsr. For corrosive gases.)
*For medium flow rate.
*Norminal flow : 400NL/min(nor) at P1=1.5MPa and P2=0.6MPa
(3)S-TORR 150sr.
*For non-corrosive semiconductor gases.
*For high flow rate.
*Norminal flow : 1,200NL/min(nor) at P1=1.5MPa and P2=0.6MPa
2.For Corrosive Gases
(1)S-TORRII 1800sr.
*For highly corrosive gases.
*Using high anti-corrosive alloy Hastelloy on all the surfaces contacting gas.
*Example of norminal flow : HCL 35NL/min,CL2 10NL/min.
(2)S-TORRII E1800sr.
*For corrosive gases.
*Using high anti-corrosive alloy Hastelloy on all the surfaces contacting gas expect for the body and joints.
*For uses not requiring the Super-TORRII 1800sr.
*Example of norminal flow : HCL 35NL/min , CL2 10NL/min.
*Consult the Hsin Teng Trading Co.,Ltd that Super-TORRII E1800sr. can not full fill the flow rate requirement.
3.For High Inlet Pressure Gases.
(1)S-TORRII 1300sr.
*For non-corrosive semiconductor gases in cylinders.(1800sr. for corrosive gases)
*Standard model.
*Norminal flow : 80NL/min(nor) at P1=10MPa and P2=1MPa
*Consult Hsin Teng Trading Co.,Ltd when using at 200cc/min or less.
(2)S-TOORII 2300sr.
*For non-corrosive semoconductor gases in cylinders.
*For not only compressed gases but also for liquefied gases.
*For medium flow rate.
*Norminal flow : 400NL/min(nor) at P1=10MPa and P2=1MPa.
4.Special Purpose Regulator
(1)S-TORR H50WVsr.
*For non-corrosive semiconductor gases.
*For high pressure use with pressure and gas tightness testing.
*Norminal flow : 20NL/min(nor) at P1=10MPa and P2=3MPa.
(2)S-TORRIII A10sr.
*For non-corrosive semiconductor gases.(SHsr. For corrosive gases)
*For use requiring negative pressure control.
*For pressure control on low vapor pressure gases |
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過濾器(LINE FILTER)
---------- 特性(FEATURES) ----------
--HIGH PRECISION:This product is made of stainless steel 316L for TLF series, and 316 for SHF series as its material. The low pressure line filter TLF series uses a Teflon membrane for a filter element to remove efficiently smaller particles than those specified in the specifications thanks to uniform mesh size on the element.
--GAS TIGHTNESS:All the joints are welded and the manufacturer guarantees1.3 ×10-10Pa.m3/sec or less of leakage to outside.
--INTERNAL SURFACE POLISHING:The low pressure line filter TLF series can supply highly clean gases because its internal surface is polishing finished as standard.
--SMALL SIZE AND LIGHT WEIGHT:The line filter is small and light,thus it saves spaces for piping.
---------- 用途(APPLICATION) ----------
This filter is appropriate for gas lines requiring high purity keeping such as gases for semiconductor ,and analysis,etc. |
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